Method of deposition and deposition apparatus for that method,申请号KR20040089649-传众专利搜索

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发明名称	Method of deposition and deposition apparatus for that method
摘要
申请公布号	KR100637180(B1)	申请公布日期	2006.10.23
申请号	KR20040089649	申请日期	2004.11.05
申请人		发明人
分类号	C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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