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发明名称
METHOD FOR DETERMINING PARAMETER DISTRIBUTIONS OF OBJECT PROPERTIES
摘要
申请公布号
KR100637553(B1)
申请公布日期
2006.10.20
申请号
KR20007014267
申请日期
2000.12.15
申请人
发明人
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
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