METHOD FOR CRYOSTATIC CONTROL OF INTEGRATED-CIRCUIT ACTIVE COMPONENTS (ALTERNATIVES)

摘要

FIELD: cryogenic engineering; development and production of integrated circuits. ^ SUBSTANCE: proposed method that can be used in development and production of integrated circuits to ensure desired in-service characteristics by maintaining operating temperatures of both separate components incorporated in integrated circuit and functional units as a whole at cryogenic level includes heat transfer directly from integrated-circuit components that want cooling by means of cryogenic system whose components are formed by nanostructures, this system being disposed within physical location of integrated circuit. As an alternative, heat transfer is proposed to be effected by cryogenic system components physically integrated with active components of integrated circuit. ^ EFFECT: enhanced technical and economic efficiency of cryostatic control process for active components of integrated circuits. ^ 2 cl