| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of improving adhesion strength and increasing the number of electrodes, and a detection method of the physical quantity sensor. <P>SOLUTION: This physical quantity sensor is equipped with a core part 4, at least one beam part 7, a weight part 2, and at least one or more auxiliary parts 5. The core part 4 constitutes a support part 3. At least one beam part 7 is formed to be extended from the core part 4. The weight part 2 is supported by the support part 3 by being connected to one end connected to the core part 4 at the beam part 7 and the other end positioned on the opposite side. The auxiliary parts 5 are arranged through the beam part 7 and a clearance 9, and constitutes the support part 3 connected to the core part 4. <P>COPYRIGHT: (C)2007,JPO&INPIT |
