| 摘要 |
PROBLEM TO BE SOLVED: To aim at gaining both the detection efficiency of an electron discharged from a sample, and the energy discrimination capability of an energy filter. SOLUTION: The energy filter includes at least two cylinders. The two cylinders are set to be electrodes extended in the axial direction of electron beams. At least one portion of the two electrodes is positioned at the same height when viewed from a sample. As a result, the detection efficiency can be improved in the electron discharged from the sample, and at the same time the energy discrimination capability can be improved in the energy filter. COPYRIGHT: (C)2007,JPO&INPIT
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