THIN FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin film forming apparatus uniformly forming the whole thickness of a film which is formed on a continuous strip support with a droplet ejection head. SOLUTION: The wetting tension on the surface of the continuously supplied support is 30 to 70 dyne/cm. The surface tension of the coating liquid is 15 to 50 dyne/cm. The wetting tension on the surface of the support is made higher than the surface tension of the coating liquid. COPYRIGHT: (C)2007,JPO&INPIT