发明名称 SEMICONDUCTOR ACCELERATION SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 Although a weight part of an acceleration sensor chip fixed on a die pad is coated with a gelatinous resin part of low elasticity, the weight part is easily displaced by an external acceleration. Thus, an acceleration can be detected with accuracy. Furthermore, long-term reliability equal to those of regular resin packages is ensured because those portions of an acceleration sensor device which are not used for acceleration sensing are sealed with a resin part.
申请公布号 KR100636580(B1) 申请公布日期 2006.10.19
申请号 KR20050008128 申请日期 2005.01.28
申请人 发明人
分类号 G01P15/08;B81B7/02;G01P1/02;G01P15/12;H01L21/56;H01L23/28 主分类号 G01P15/08
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