| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable higher-speed position control than the prior art while realizing high responsiveness and performing highly precise vibration control similarly to the prior art without seriously increasing an amount of consumption of air even when an object to be vibration-removed is increased in size, in an air spring unit 2 adapted for diminishing the vibration of the object to be vibration-removed by using an air spring 20 as an actuator. <P>SOLUTION: By detecting the vibrating condition of the object to be vibration-removed such as a level block 3 by means of an acceleration sensor 31 so as to feed back the detected vibrating condition and control a servo valve 34, an internal pressure of the air spring 20 is varied to apply to the object the control force for diminishing the vibration thereof. Further, by detecting a change in relative height of the object to be vibration-removed with respect to a basement by means of a displacement sensor 32 so as to feed back the detected relative height change and control an electromagnetic proportional valve 35, the internal pressure of the air spring 20 is adjusted so that the height of the object approximates to a reference position. Since the control of the air pressure in the above-described two manners complements each other, it is possible to realize both the high responsiveness and the stability of control. <P>COPYRIGHT: (C)2007,JPO&INPIT |
