发明名称 DEVICE AND METHOD FOR MEASURING PHYSICAL PROPERTIES
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a technique for simply ascertaining in which part of a laminated film troubles exist. <P>SOLUTION: The device is composed by constituting an electron element. The device has a lamination insulating film. A pair of electrode terminals is provided in the lamination insulating film apart from each other. The end face of each electrode terminal is provided so as to share only one interface between the laminated insulating films. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006286751(A) 申请公布日期 2006.10.19
申请号 JP20050101957 申请日期 2005.03.31
申请人 CONSORTIUM FOR ADVANCED SEMICONDUCTOR MATERIALS &RELATED TECHNOLOGIES 发明人 KATO ICHIRO
分类号 H01L21/768;H01L23/522 主分类号 H01L21/768
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