VACUUM APPARATUS HAVING RECIPROCATING MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a vacuum apparatus having a reciprocating mechanism, in which the shaft center of a reciprocating drive fixed to the outside of a vacuum vessel can be made, by a simple constitution, to coincide with the center of a driving shaft for driving a targeted material fit to a shield housed in the vacuum vessel and which has high reliability. SOLUTION: The vacuum apparatus is provided with: a first vacuum flange which is positioned outside the vacuum vessel by a positioning mechanism for aligning the shaft center of the drive with the center of the driving shaft and is fit airtightly to the shield; a second vacuum flange which is arranged above the first vacuum flange and to which the driving shaft is fixed; a first bellows arranged between the first vacuum flange and the second vacuum flange on the outside of the vacuum vessel to keep the driving shaft airtight while the driving shaft moves with reciprocating strokes or rotates; and a second bellows arranged between the vacuum vessel and the first vacuum flange to absorb the force which is generated when the shaft center of the drive is aligned with the center of the driving shaft and exerted in the direction perpendicular to the shaft center direction. COPYRIGHT: (C)2007,JPO&INPIT