| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for a visual examination capable of showing the difference between samples which has not been detected in conventional visual examination by a user by reporting data showing the difference between images used in the visual examination of the sample other than flaw data, and also to provide a method for visual examination. SOLUTION: The device for a visual examination is constituted of an imaging means 4 for picking up the surface image of the sample 3, flaw detecting means 5-8 for detecting the flaw of the sample 3 from the image obtained by the imaging means, a distribution data calculating means 10 for calculating distribution data showing the distribution state of the pixel value in the image picked up by the imaging means and a distribution data output means 20 for outputting the distribution data other than the output of the flaw data detected by the flaw detecting means. COPYRIGHT: (C)2007,JPO&INPIT
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