| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam irradiation apparatus capable of implementing smooth and stable scanning movements by a simple constitution. SOLUTION: A laser beam from a semiconductor laser 100 is made incident onto an irradiation lens supported at a lens actuator 300. The laser beam passed through the irradiation lens changes its angle of emergence in the direction of a Y-Z plane according to the drive of the lens actuator 300. A target region is thereby scanned with the laser beam. Then, a DSP control circuit 10 controls an actuator drive circuit 40 in such a way that the actuator drive circuit 40 outputs control signals by sine waves so that the laser beam may be irradiated to the target irradiation region at regular intervals and controls a laser drive circuit in such a way as to irradiate the laser beam at time intervals corresponding to the control signals. COPYRIGHT: (C)2007,JPO&INPIT
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