| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control device for controlling a temperature by cooling with a refrigerant and heating with an electrothermal heater, not increasing heat capacity of a temperature controlled-object in controlling the temperature controlled-object by heating from a low temperature to a high temperature, and capable of shortening a temperature rise time of the temperature controlled-object, and widening a range of choice of used refrigerant without evaporating or oxidizing the refrigerant and generating a harmful gas. SOLUTION: This temperature control device comprises a refrigerant discharging means for discharging the refrigerant 4 remaining in cooling passages 8, 29 of the temperature controlled-objects P1, P2, P3 from the cooling passages 8, 29, when the temperature controlled-object is controlled by being heated from the low temperature to the high temperature. The refrigerant discharging means is provided with an air supplying line 11 for delivering the air from a cooling passage inlet 8a of the temperature controlled-object P1 to the cooling passage 8, a pump 37 connected with a cooling passage outlet 8b of the temperature controlled-object P2, and the temperature controlled-object P3 for naturally discharging the refrigerant 24 in the cooling passage 29. COPYRIGHT: (C)2007,JPO&INPIT
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