| 发明名称 |
Lithographic apparatus and device manufacturing method |
| 摘要 |
In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. Gas is used between the structure and the surface of the substrate to contain liquid in the space.
|
| 申请公布号 |
US2006232756(A1) |
申请公布日期 |
2006.10.19 |
| 申请号 |
US20050239480 |
申请日期 |
2005.09.30 |
| 申请人 |
|
发明人 |
LOF JOERI;DERKSEN ANTONIUS THEODORUS A.M.;HOOGENDAM CHRISTIAAN A.;KOLESNYCHENKO ALEKSEY;LOOPSTRA ERIK R.;MODDERMAN THEODORUS M.;MULKENS JOHANNES CATHARINUS H.;RITSEMA ROELOF AEILKO S.;SIMON KLAUS;DE SMIT JOANNES T.;STRAAIJER ALEXANDER;STREEFKERK BOB;SANTEN HELMAR V.;DONDERS SJOERD NICOLAAS L. |
| 分类号 |
G03B27/42 |
主分类号 |
G03B27/42 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
