APPARATUS AND METHOD FOR APPLYING A MATERIAL TO AN OBJECT

摘要

An apparatus to apply a material to an object. An ambience of a first chamber can be kept in inert gas. An ambience of a second chamber can be replaced between inert gas and air. A connecting channel connects between the first and second chambers. A first openable and closable door is provided between the first and second chambers. A second first openable and closable door is provided on the second chamber. A first holder in the first chamber can detachably hold an applicator. A second holder in the second chamber can detachably hold the applicator. A moveable table in the second chamber moves the applicator which is filled with the material and held by the second holder from the second chamber to the first chamber through the connecting channel. The moveable table moves the applicator which ends the application of the material from the first chamber to the second chamber through the connecting channel.