| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device constituted simple and light and capable of realizing positioning with high precision. SOLUTION: It is possible to lighten a surface plate 1 without precisely working the overall upper surface of the surface plate in positioning it in high precision as a moving member 6 is suspended on a supporting plate 3 through sliders 4, 4 and guide rails 5, 5. That is, it is effective to assemble the surface plate 1 by disassembling it and carrying it to a site in setting the positioning device. Additionally, part precision and deformation of supporting legs 2, 2 never affects the positioning. COPYRIGHT: (C)2007,JPO&INPIT
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