发明名称 |
Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof |
摘要 |
The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
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申请公布号 |
US2006235140(A1) |
申请公布日期 |
2006.10.19 |
申请号 |
US20050553976 |
申请日期 |
2005.10.20 |
申请人 |
TANAKA HIROYUKI;FUKUYAMA KOUJI;NOGUCHI TSUYOSHI |
发明人 |
TANAKA HIROYUKI;FUKUYAMA KOUJI;NOGUCHI TSUYOSHI |
分类号 |
C08L27/12;C09K3/10 |
主分类号 |
C08L27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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