发明名称 Six-legged type piezoelectric vibration gyroscope
摘要 A six-legged type piezoelectric vibration gyroscope having a pair of exciting arms extending from a body ( 2 ) in a first direction (A 1 ) with a space therebetween, one non-exciting arm ( 3 c) extending in the first direction between the exciting arms from the body, a pair of detecting arms ( 4 a, 4 b) extending from the body in a second direction (A 2 ) with a space therebetween, and one non-detecting arm ( 4 c) extending in the second direction between the detecting arms from the body. The exciting arms are coupled with a drive-side electrode. The detecting arms are coupled with a detection-side electrode. The exciting arms, non-exciting arm, detecting arms, and non-detecting arm respectively consist of a piezoelectric. The respective exciting arms differ in width size from the non-exciting arm. The respective exciting arms differ in width size from the respective detecting arms. The respective exciting arms differ in width size from the non-detecting arm.
申请公布号 US2006230828(A1) 申请公布日期 2006.10.19
申请号 US20040548102 申请日期 2004.03.05
申请人 JAPAN AVIATION ELECTRONICS INDUSTRY LIMITED 发明人 INOUE TAKESHI;YAMAMOTO MITSURU;OCHI ATSUSHI;KURAMOTO KENJI;NAKAJIMA MITSUHIRO
分类号 G01P9/04;G01C19/56;G01C19/5642;G01P1/04;H01L41/113 主分类号 G01P9/04
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