发明名称 PHASE CHANGE MEMORY CELL DEFINED BY A PATTERN SHRINK MATERIAL PROCESS
摘要 <p>A memory cell device includes a first electrode, a phase-change material adjacent the first electrode, and a second electrode adjacent the phase-change material. The phase-change material has a sublithographic width defined by a pattern shrink material process, such as RELACS TM or SAFIER TM. In another embodiment of the present invention, a heater adjacent the first electrode has a sublithographic width defined by a pattern shrink material process.</p>
申请公布号 WO2006108541(A1) 申请公布日期 2006.10.19
申请号 WO2006EP03089 申请日期 2006.04.05
申请人 INFINEON TECHNOLOGIES AG;HAPP, THOMAS 发明人 HAPP, THOMAS
分类号 H01L45/00;H01L27/24 主分类号 H01L45/00
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