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发明名称
Halbleiter integrierte Schaltungsvorrichtung und Vorrichtung zu ihrer Prüfung
摘要
申请公布号
DE60214492(D1)
申请公布日期
2006.10.19
申请号
DE20026014492
申请日期
2002.07.29
申请人
NEC ELECTRONICS CORP.
发明人
OZAKI, HIDEHARU
分类号
G01R31/28;G01R31/3185;G01R31/319;H01L21/822;H01L27/04
主分类号
G01R31/28
代理机构
代理人
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