| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a guiding apparatus which does not fluctuate in drive characteristics in spite of a pre-load fluctuation or worn powder biting or the like and reduces the worn amount of the friction member of an ultrasonic motor, and its drive control method. <P>SOLUTION: In the guiding apparatus wherein a mobile body is frictionally driven with the ultrasonic motor which is controlled by PID feedback, the fluctuation width from the drive start till the drive end of the drive voltage of the ultrasonic motor is controlled down to 500 mV or less. <P>COPYRIGHT: (C)2007,JPO&INPIT |
