发明名称 PHOTOSENSOR
摘要 <P>PROBLEM TO BE SOLVED: To make radiation sensitivity of a photosensor substantially constant in a plurality of discrete wavelength regions. <P>SOLUTION: The photosensor comprises a semiconductor chip having a light receiving part and for performing photoelectric conversion, and an interference filter arranged in an optical path of incident light on the light receiving part, and outputs an electric signal of a level corresponding to light incident on the light receiving part. When a photoelectric conversion ratio of the semiconductor chip to light of a certain wavelength &lambda;is S(&lambda;) and the transmissivity of the interference filter to light of a certain wavelength &lambda; is F(&lambda;), the interference filter is designed so that the product of S(&lambda;) and F(&lambda;) is substantially constant in the plurality of the discrete wavelength regions. Since the radiation sensitivity of the photosensor is substantially proportional to the product of S(&lambda;) and F(&lambda;), the radiation sensitivity of the photosensor can be made substantially constant in the plurality of the discrete wavelength regions by providing the interference filter. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006284474(A) 申请公布日期 2006.10.19
申请号 JP20050107288 申请日期 2005.04.04
申请人 NIKON CORP 发明人 YAMADA HIDENOBU;NOMURA HITOSHI
分类号 G01J1/04;G01J1/02;H01L27/14;H01L31/02;H01L31/10 主分类号 G01J1/04
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