| 摘要 |
An excimer or molecular fluorine gas discharge laser which may comprise a pair of electrodes extending longitudinally across a lasing chamber forming a discharge region, and method of operating same, is disclosed which may comprise a fan providing sufficient gas movement to allow for arc-free laser operation at a selected laser output light pulse repetition rate; a flow guiding mechanism extending longitudinally across the lasing chamber along the length of the discharge region configured to optimize the fan power consumption at a selected fan speed, e.g., that is greater than an arc free fan speed; and a flow speed increasing mechanism selectively positioned along the length of the flow guiding mechanism selectively increasing the lasing gas flow rate in the vicinity of the flow increasing mechanism to thereby enable running at the selected fan speed at a reduced power consumption level in the fan.
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