Glow discharge drilling apparatus and glow discharge drilling method

摘要

A glow discharge drilling apparatus enables switching of a continuous mode for continuously supplying electric power and an intermittent mode for intermittently supplying electric power. Electric power is supplied in the intermittent mode with respect to a sample easily melted by a heat due to a glow discharge and a sample easily broken by a force of sputtering due to a glow discharge or the like, whereby the sample is drilled so that an observation face capable of carrying out good observation can be obtained. When the sample is not easily melted and easily broken, the sample is drilled so that a good observation face can be efficiently obtained by supplying electric power in the continuous mode.