Nanotube surface coatings for improved wettability

摘要

A thermal interface includes an array of generally aligned carbon nanotubes joined to a surface with a metal layer. The array of carbon nanotubes includes a coating on the ends of the carbon nanotubes for improved wetting of the metal layer to the ends of the carbon nanotubes so that the thermal resistance at the interface between the carbon nanotubes ends and the metal is reduced. A semiconductor device that employs a thermal interface of the invention, and a method for fabricating the thermal interfaces are also provided.