发明名称 MEMS DRIVES ADAPTED TO PROVIDE THREE DEGREES OF MOBILITY
摘要 <p>An apparatus for providing three degrees of mobility in an electromechanical drive arrangement comprises a substrate base, two or more micro-drives coupled to the substrate base, two or more suspension leg pairs, each suspension leg pair coupled to a micro-drive, and each suspension leg including articulations disposed on either end of the suspension leg to provide two-direction rotational capability, and a platform coupled to the two or more suspension leg pairs to move in a first, second, and third degree of mobility in response to complimentary activation of the two or more micro-drives.</p>
申请公布号 WO2006110304(A1) 申请公布日期 2006.10.19
申请号 WO2006US11001 申请日期 2006.03.24
申请人 INTEL CORPORATION;EPITAUX, MARC 发明人 EPITAUX, MARC
分类号 B81B3/00 主分类号 B81B3/00
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