| 摘要 |
A remote control unit of semiconductor deposition equipment is provided to reduce a working time and to prevent process accidents due to the mistake of a worker by using an improved arrangement of hot key functional buttons. A remote control unit(200) of semiconductor deposition equipment comprises a body(210), a plurality of functional buttons and a plurality of hot key functional buttons. The plurality of functional buttons(230) are installed on the body to perform a variety of discrete functions. The plurality of hot key functional buttons(240) are installed on the body. The plurality of hot key functional buttons are used for performing one ore more functions. The remote control unit further includes a hot key function setting part.
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