| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emission device, an electron emission display device, and a manufacturing method of the electron emission device. <P>SOLUTION: The electron emission device comprises a substrate 2, cathode electrodes 6 composed of a main electrode 6a and an auxiliary electrode 6b formed on the substrate 2, resistor layers 14 formed on the auxiliary electrodes 6b, electron emission parts 12 jointed to the resistor layers 14. first openings 8a exposing the electron emission part 12, an insulation layer 8 formed on the substrate 2, second openings 10a corresponding to first openings 8a, and a gate electrode 10 formed on the insulation layer 8. The resistor layer 14 formed by diffusing a part of the auxiliary electrode 6b has specific resistance changing its value along a thickness direction. By this, the resistor layer 14 can be easily formed without an additional process, and it is unnecessary to use an expensive material for the resistor layer, and there is such an effect that the resistor layer is hardly damaged by an etching liquid at an etching process due to its strong acid resistant property unlike a conventional resistor layer. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
