| 摘要 |
PROBLEM TO BE SOLVED: To contact directly with fine individual cell using a microprobe, to allow electric evaluation without damaging a thin film of the cell, and further to align a contact accurately on the cell even when the resolution of an optical microscope is not sufficient. SOLUTION: This device is provided with an optical microscope aligning mark 76, that is a guiding mark for controlling a position of a measuring cantilever C2 with respect to a specimen measuring terminal face using the optical microscope, on a back face of a measuring cantilever C2. COPYRIGHT: (C)2007,JPO&INPIT
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