| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe microscope and a physical property measuring method capable of reducing an influence of the characteristic of a measuring system, shortening a time required for measurement, and measuring highly accurately the physical property of a sample. SOLUTION: This probe microscope is equipped with a stage 3 having a placing plane for placing the sample thereon, a support means 5 supporting the stage 3 and constituted swingably in the vertical direction to the sample surface, an excitation means 7 for vibrating the support device 5 with a prescribed frequency for vibration and an amplitude for vibration, a movement control means 6 for controlling movement of the support device 5 in the vertical direction, a probe 10 arranged so that its tip is brought into contact with the sample surface, a first vibration state measuring means 11 for measuring the vibration state of the probe 10 in the state where the probe tip is in contact with the sample surface 2a, a second vibration state measuring means 13 for measuring the vibration state of the placing plane 3a when the excitation means 7 is operated, and a measuring processing means 12 for measuring the physical property of the sample by comparing a waveform of the vibration state measured by the second vibration state measuring means 13 with a waveform of the vibration state measured by the first vibration state measuring means 11. COPYRIGHT: (C)2007,JPO&INPIT
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