发明名称 POTENTIAL MEASURING METHOD AND MEASURING INSTRUMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a measuring method and measuring instrument of high measurement accuracy having excellent responsivity by converting a physical phenomenon or chemical phenomenon into electric charge information for quantifying a minute change while measuring both a wide measurement range and a narrow measurement range by one means correspondently to a measuring object or a measurement purpose. <P>SOLUTION: In this method, electric charge is supplied from an electric charge supply part 1 to a sensing part 3 to take out the supplied electric charge from the sensing part 3 by means of floating diffusion 5 and the amount of supplied electric charge is detected to measure potential related to the physical phenomenon or chemical phenomenon. This method is characterized in that a measurement range is set according to the size of a change in physical or chemical quantities to set the number of times of accumulating moving electric charge on the floating diffusion 5 while controlling the number of times of accumulation on the basis of the set measurement range. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006284225(A) 申请公布日期 2006.10.19
申请号 JP20050101496 申请日期 2005.03.31
申请人 HORIBA LTD 发明人 MIMURA SUSUMU
分类号 G01D5/12;G01N27/00;G01N27/414;G01N27/416;H01L21/339;H01L29/762 主分类号 G01D5/12
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