摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity detection method capable of detecting highly accurately an object physical quantity by compensating precisely temperature characteristics, even in the case of a sensor wherein a parameter such as offset or sensitivity is changed non-linearly by a temperature change, and a sensor device utilizing the detection method. SOLUTION: The relation between a sensor output and an actual physical quantity is approximated by a quadratic equation wherein non-linearity to the physical quantity of the sensor itself and each temperature characteristic of the sensitivity and the offset are specified respectively as each coefficient. Each of the coefficients is also approximated by a quadratic equation using the temperature as an independent variable, and each temperature coefficient is stored and held in a ROM 22. The temperature coefficient and a temperature at each time are substituted for the quadratic equation using the temperature as the independent variable, and the acquired coefficient and the sensor output are substituted for the quadratic equation specifying the relation between the sensor output and the actual physical quantity, to thereby calculate the actual physical quantity. COPYRIGHT: (C)2007,JPO&INPIT |