发明名称 CUTTING DEVICE AND BLADE CONDITION DETECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a cutting device and a blade condition detecting method, wherein both of a damage detection and a wear detection of a cutting blade can be accurately carried out by one blade detecting means, a use space in the cutting device can be reduced and a low cost is achieved, and in addition, a productivity can be intended to enhance by a high throughput. SOLUTION: The cutting device 10 comprises a blade 22, a blade detection sensor 30 for detecting a condition of the blade 22, a moving means 70 for going near or away the blade detection sensor 30 to or from an outer periphery of the blade 22; and a blade condition detector 40 for detecting a damage and wear of the blade 22 based on the detection result of the blade detection sensor 30. The blade condition detector 40 has a damage detector 50 for detecting a damage, a wear detector 60 for detecting a wear, and a switcher 44 for switching the damage detector 50 and the wear detector 60 in response to a position of the blade detection sensor 30. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006287111(A) 申请公布日期 2006.10.19
申请号 JP20050107603 申请日期 2005.04.04
申请人 DISCO ABRASIVE SYST LTD 发明人 FUJINAMI KOICHI;ISHIYAMA SHINICHI
分类号 H01L21/301;B24B27/06;B24B49/12 主分类号 H01L21/301
代理机构 代理人
主权项
地址