| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To detect a trouble occurring in a feeding valve and a taking-out valve at an initial stage. <P>SOLUTION: An air tank 5 is connected to an upstream side of adsorption tanks 1, 2 through the feeding valves 10, 11. A nitrogen tank 22 is connected to a downstream side of the adsorption tanks 1, 2 through the taking out valves 20, 21. Further, pressure detectors 39, 40 are provided on the air tank 5 and the nitrogen tank 22, respectively. Further, a feeding valve/taking-out valve action confirmation circuit 103 raises a pressure in the air tank 5 and the nitrogen tank 22, repeats an opening/closing action of the feeding valves 10, 11 and the taking out valves 20, 21 ten times in the state that the pressure of the adsorption tanks 1, 2 is reduced and detects pressure difference of the air tank 5 and the nitrogen tank 22 before and after the opening/closing action using the pressure detectors 39, 40. the trouble in the feeding valve 10 or the like can be inspected by the fact whether or not the pressure difference is smaller than a threshold value. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
