| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus of correcting a stage position capable of realizing spatial resolution of digital arithmetic operation in time response concerning not only a state characteristic of signal output but also a transient characteristic as a dynamic system. SOLUTION: This apparatus is provided with a delay delaying filter for correcting time delay due to electric signal propagation by digital operation, when a stage position correcting signal created based on stage position information is transmitted as an output command value to an electronic deflection system of a mirror barrel; and an improving means for using the delay delaying filter to improve temporal deviation between an LBC output command value, and an actually required LBC connection value. With this configuration, the spatial resolution of the digital arithmetic operation can be realized in the time response concerning transient characteristic. COPYRIGHT: (C)2007,JPO&INPIT
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