| 摘要 |
PROBLEM TO BE SOLVED: To suppress variations in errors between magnification steps and to ensure dimension accuracy between magnifications. SOLUTION: The charged particle beam device is equipped with an image recording device storing magnified images of a sample, an image arithmetic unit extracting a minute amount of features of magnified images of a periodical sample, a mechanism deflecting the charged particle beam and an image arithmetic unit extracting a minute amount of features of magnified images of a non-periodical sample, and includes a means to change the amount of the scanning of the charged particle beam. Also, it includes a mechanism keeping a sample with a periodical structure and a sample with a non-periodical structure for a sample base, or a sample simultaneously having a periodical structure and a non-periodical structure, and a retention device of measuring length values for all magnifications capable of automatically changing a magnification factor of the sample magnified images. COPYRIGHT: (C)2007,JPO&INPIT
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