| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope device capable of speedily imaging a sample with high quality without reference to a shift in imaging position during a scan. SOLUTION: The microscope device 100 is equipped with a driving part 2, a microscope 3, a line sensor 4 which scans and images a sample enlarged by the microscope 3, and a control computer 150 which generates an enlarged image of the sample from the pick-up image of the line sensor 4. The control computer 150 controls the driving part 2 to scan the sample 1 along an X axis while changing the Y-axial position of the line sensor 4 each time one scan is made. The control computer 150 finds and records a Y-axial shift in imaging position of the line sensor when imaging the sample 1 at respective imaging positions. The control computer 150 when synthesizing respective partial images together positions the images according to recorded position shifts and synthesizes them. COPYRIGHT: (C)2007,JPO&INPIT
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