| 摘要 |
A system ( 70 ) for crystallography including a sample holder ( 74 ), an electron source ( 76 ) for generating an electron beam, and a scanning actuator ( 80 ) for controlling the relative movement between the electron beam and the crystalline sample, the scanning actuator being controllable for directing the electron beam at a series of spaced apart points within the sample area. The system also includes an image processor ( 84 ) for generating crystallographic data based upon electron diffraction from the crystalline sample and for determining whether sufficient data have been acquired to characterize the sample area The system further includes a controller ( 86 ) for controlling the scanning actuator to space the points apart such that acquired data is representative of a different grains within the crystalline sample. IN other embodiments, the invention includes one or more ion beams ( 178, 188 ) for crystallography and a combination ion beam/electron beam ( 218, 228 ).
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