| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus for a thin sheet by plasma sputtering. <P>SOLUTION: The surface treatment apparatus for applying plasma treatment to a member to be treated is equipped with a chamber (40) to which the member (150) to be treated is vertically placed and is conveyed in this state, at least one set of sputtering cathodes (410, 410) which respectively face the front and rear surfaces of the member (150) conveyed in the chamber, are arranged to be symmetrical with both sides of the member, and have target materials on the surfaces facing at least the member, magnets (420, 420) which are respectively arranged on the rear surface sides of the respective sputtering cathodes and can be moved in the extending direction of the member, a gas supply means which introduces a process gas into the chamber, and a plasma power source which generates plasma between the sputtering cathodes and the member. <P>COPYRIGHT: (C)2007,JPO&INPIT |
