THIN FILM ELECTRON SOURCE, MANUFACTURING METHOD OF THE SAME, AND IMAGE DISPLAY DEVICE USING THE THIN FILM ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a thin film electron source of which defect in an anode oxide film is reduced, having high reliability and long life, and an image display device using the same.

SOLUTION: An insulation layer of the thin film electron source formed by laminating a first electrode 11, the insulation layer 12, and a second electrode 13 on an insulation substrate 10 in this sequence is formed by an anode oxidation method. The number of defects existing in the insulation layer is reduced to 3×1019/cm3or less.

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