发明名称 Method for manufacturing a semiconductor device, as well as a semiconductor substrate
摘要 A method for manufacturing a semiconductor device, includes: forming a recognition mark that defines a well-forming region for forming a well on a semiconductor substrate; forming a mask, using the recognition mark, that is patterned so that the well-forming region is opened; introducing an impurity into the well-forming region; performing heat treatment for forming a well by diffusing the impurity; and forming an element isolation region on the semiconductor substrate.
申请公布号 US2006234468(A1) 申请公布日期 2006.10.19
申请号 US20060402590 申请日期 2006.04.12
申请人 SEIKO EPSON CORPORATION 发明人 SAITO TAKESHI
分类号 H01L21/76 主分类号 H01L21/76
代理机构 代理人
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