| 摘要 |
A relay long in service life aiming at higher reliability and lower cost is achieved by use of a technology of microelectromechanical-systems. The relay comprises a flow path having narrow chores and wide chokes, formed by bonding two insulating members together, a plurality of liquid chambers formed by partitioning the flow path with the narrow chokes and the wide chokes, a plurality of electrodes disposed at the plurality of the liquid chambers, respectively, first and second gas chambers disposed so as to communicate with respective ends of the flow path, a gas sealed in the first and second gas chambers, respectively, heating means for heating the gas, and holes defined in one of the insulating members, communicating with the flow path, respectively, wherein a conductive fluid is introduced into the flow path through respective inlet ports of the holes, and the respective inlet ports are sealed.
|
