发明名称 |
Device for coating a substrate and module |
摘要 |
A coating machine has coating chamber that is modular, with a module (1) having chamber section (2), first support (3) that is arranged removably in or at the chamber section, and second support (4) that is arranged removably at the first support. An independent claim is also included for a module for the coating machine comprises chamber section, first support that is arranged removably in or at the chamber section, and second support that is arranged removably at the first support. |
申请公布号 |
EP1713110(A1) |
申请公布日期 |
2006.10.18 |
申请号 |
EP20050007805 |
申请日期 |
2005.04.08 |
申请人 |
APPLIED MATERIALS GMBH & CO. KG |
发明人 |
BUCHBERGER, HANS;GEISS, ANDREAS;KREMPEL-HESSE, JOERG DR.;HAAS, DIETER |
分类号 |
C23C14/56;H01J37/32 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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