发明名称 CYLINDRICAL MICROWAVE CHAMBER
摘要 <p>Microwave apparatus for exposing materials on an elongated member, such as a mandrel, to microwave energy. The apparatus includes a cylindrical microwave exposure chamber (10). Elongated slots (20) spaced about the circumference of the chamber (10) are in communication with openings (50) in the walls of waveguides (28) attached to the exterior (19) of the chamber. Microwave energy fed into the waveguide (28) is coupled into the chamber (10) through the associated openings (50) and slots (20). Bars (54) spaced apart in the direction of wave propagation span the opening (50) in the waveguide for uniform or customized delivery of microwave energy into the chamber (10). A low-profile mode stirrer (38) at the rear end of the chamber further evens out the energy distribution. A front plate (62) seals to the chamber and supports a rotatable mandrel (60) on which material to be exposed to microwave energy in the chamber (10) is wrapped.</p>
申请公布号 EP1712108(A1) 申请公布日期 2006.10.18
申请号 EP20050712274 申请日期 2005.01.31
申请人 INDUSTRIAL MICROWAVE SYSTEMS, L.L.C. 发明人 DROZD, MICHAEL, J.;DROZD, ESTHER
分类号 H05B6/70;C23C14/00;C23C16/00;H01L21/469;H05B6/72;H05B6/74;H05B6/80;H05B31/26 主分类号 H05B6/70
代理机构 代理人
主权项
地址