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发明名称
SUBSTRATE SUPPORT
摘要
申请公布号
KR100636491(B1)
申请公布日期
2006.10.18
申请号
KR20047013047
申请日期
2003.02.18
申请人
发明人
分类号
H01L21/68;B65G49/07;H01L21/00;H01L21/205;H01L21/687
主分类号
H01L21/68
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代理人
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