Method and apparatus for performing metrology dispatching based upon fault detection

摘要

A method and an apparatus for dynamically adjusting a metrology routing of a batch of workpieces. The method comprises performing a process step upon a batch of workpieces using a processing tool, performing a tool state analysis upon the processing tool, and performing a dynamic metrology routing adjustment process based upon the tool state analysis. The dynamic metrology routing adjustment process further comprises correlating the tool state analysis to the batch of workpieces and adjusting a metrology routing based upon the correlation.