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发明名称
PHYSICAL VAPOR DEPOSITION TARGET CONSTRUCTIONS
摘要
申请公布号
EP1711646(A2)
申请公布日期
2006.10.18
申请号
EP20050722706
申请日期
2005.02.02
申请人
HONEYWELL INTERNATIONAL, INC.
发明人
FERRASSE, STEPHANE;ALFORD, FRANK;KIM, JAEYEON;GRABMEIER, SUSANNE I.;STROTHERS, SUSAN D.;WRAGG, ANDREW N. A.;PRATER, ROBERT, M.;HORT, WERNER, H.;PAYTON, MICHAEL, D.
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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