| 摘要 |
An apparatus for manufacturing an organic EL(Electro-Luminescence) display device is provided to reliably form a mask by improving stretching uniformity of the mask. An apparatus for manufacturing an organic EL display device includes a mask(160), plural grippers(163), a power supply(165), a jaw(175), and at least one metal pattern(177). The mask selectively passes a deposition material to form a thin film on a substrate. The grippers clamp the mask around the mask. The power supply supplies power for stretching the mask to the grippers. The jaw is positioned between the respective grippers and the mask and delivers the power to the mask. The metal pattern is positioned between the grippers and the mask and measures a degree of erosion of the jaw and a degree of stretching, which is applied on the mask via the jaw. |
