DEVICE FOR CONTROLLING THE ELECTRONIC TEMPERATURE IN AN ECR PLASMA

摘要

The invention relates to a device which is used to control the electronic temperature in an ECR plasma chamber (1). The inventive device comprises at least one moderator (100) which is placed on the path of electrons having an energy greater than a pre- determined energy, such as to form an obstacle to said electrons. The invention is suitable for use in relation to ion sources and plasma machines.