| 发明名称 |
Method of preparing trialkyl group va metal compounds |
| 摘要 |
<p>Disclosed are methods of preparing trialkyl Group VA metal compounds in high yield and high purity. Such trialkyl Group VA metal compounds are substantially free of oxygenated impurities, ethereal solvents and metallic impurities.</p> |
| 申请公布号 |
EP1247813(B1) |
申请公布日期 |
2006.10.18 |
| 申请号 |
EP20020252450 |
申请日期 |
2002.04.05 |
| 申请人 |
SHIPLEY CO. L.L.C. |
发明人 |
SHENAI-KHATKHATE, DEODATTA V.;POWER, MICHAEL B.;AMAMCHYAN, ARTASHES |
| 分类号 |
C07F9/00;C07F9/72;C07F9/90;C07F9/94;C23C16/18;H01L21/00;H01L21/60 |
主分类号 |
C07F9/00 |
| 代理机构 |
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